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High Pressure Pump Unit Product List

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Compact High-Pressure Pump for Embedded Use 'SSBL-XX Series'

High-pressure pump that can be used in areas requiring fire and explosion prevention measures due to its air-driven design.

The "SSBL-XX series" is a pump suitable for lift-off devices that remove films by high-pressure injection of pure water, IPA, NMP, etc., onto wafers and other surfaces. It can be used in locations where fire and explosion prevention measures are necessary due to its air-driven design. Fluororesin and ultra-high molecular weight polyethylene are used as sealing materials in the pressurization section. O-rings can be selected from FKM specifications or Kalrez specifications. It has been supplied to the market since 2000 for a period of 25 years. 【Features】 ■ Compact design suitable for embedding ■ Operation allows control of discharge pressure by varying air supply pressure ■ Capable of boosting pressure up to 17.6 MPa at an air pressure of 0.5 MPa (SSBL-37.5A) *For more details, please refer to the PDF materials or feel free to contact us.

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High Pressure Pump Unit KPM-40B

A high-pressure pump unit that can simultaneously discharge two outputs with different independent pressures. It can perform dicing and deburring, such as CSP, with a single machine.

This is a pump unit using an electric plunger pump. The discharge pressure and flow rate can be adjusted according to the customer's requirements, so please feel free to consult us. 【Features】 ■ One pump can accommodate multiple related applications ■ Skeleton housing for easy integration into the customer's equipment * For more details about the product, please see the "PDF Download" button below. * Please feel free to contact us with any inquiries.

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High-pressure pump unit KPW series (for embedded use)

Air pressure regulator, air pressure gauge, discharge pressure gauge, and other components are integrated into a single design, making it suitable for device integration! Adjustable from low pressure to high pressure.

The "KPW Series" is a unit that combines the peripheral equipment basically required for high-pressure pumps, making it easy to use for purposes other than dedicated mass production devices. It is a high-pressure water generation unit with an air-driven plunger pump built-in, designed to be suitable for device integration with components such as an air pressure regulator, air pressure gauge, and discharge pressure gauge integrated into one unit. It is used for high-pressure jet cleaning, such as IPA cleaning of wafers and solvent stripping. 【Features】 ■ Compact embedded pump unit (W194×H190×D490) ■ Standard built-in solenoid valve for air supply, air regulator, and pressure gauge ■ Optional built-in solenoid valve for pure water, discharge valve for air drive, and NMP-compatible sealing materials are available *For more details about the product, please refer to the "PDF Download" button below. *Feel free to contact us with any inquiries.

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